Thin Film Circuits
Features
  • Direct deposit circuit components such as capacitors, inductors, resistors etc.
  • Wide range and high precision of available values
  • Excellent temperature and frequency characteristics through millimeter wave band
  • High density circuitry results in small effective size
  • Typical Metallizations
  • TiW = 300–800Å (0.03–0.08µm)
  • Ni = 1000–5000Å (0.1µm–0.5µm)
  • Au = 5000–50000 Å (0.5µm–5.0µm)
  • CIRCUITS
    Typical Dimensional Tolerances
  • Minimum line width: < 0.02mm
  • Minimum space: < 0.02mm
  • Tolerance of key position: < 0.0025mm
  • Tolerance of film thickness: <±20%
  • Tolerance of circuit size: <0.005mm
  • Typical Performance parameters
  • Tolerance of resistance: <±10%
  • Resistance material: TaN = 50 ohms/square
  • Tolerance of capacitance: <±20%
  • Range of frequency: 300MHz to 30GHz
  • Hole Dia. Min.: 0.1mm
  • TCR = ± 50ppm/°C
  • Current density: 0.08mA/μm
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